'Micromachining Technology for MEMS' Video Lecture

Micromachining Technology for MEMS

  • Course: MEMS and Microsystems
  • Discipline: Electronics and Communication Engineering
  • Faculty: Prof. Santiram Kal
  • Institute: IIT Kharagpur

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    Course Video Lectures Introduction to MEMS & Microsystems Introduction to Microsensors Evaluation of MEMS, Microsensors, Market Surv.. Application of MEMS MEMS Materials MEMS Materials Properties MEMS Materials Properties (Contd.) Microelectronic Technology for MEMS - II Microelectronic Technology for MEMS - III Micromachining Technology for MEMS Micromachining Process Etch Stop Techniques and Microstructure Surface and Quartz Micromachining Fabrication of Micromachined Microstructure Microstereolithography MEMS Microsensors Thermal Micromachined Microsensors Mechanical MEMS Pressure and Flow Sensor Micromachined Flow Sensors MEMS Inertial Sensors Micromachined Microaccelerometers for MEMS MEMS Accelerometers for Avionics Temperature Drift and Damping Analysis Piezoresistive Accelerometer Technology MEMS Capacitive Accelerometer MEMS Capacitive Accelerometer Process MEMS Gyro Sensor MEMS for Space Application Polymer MEMS & Carbon Nano Tubes CNT Wafer Bonding & Packaging of MEMS Interface Electronics for MEMS MEMS for Biomedical Applications (Bio-MEMS)
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